Integrated circuitry fuse forming methods, integrated circuitry programming methods, and related integrated circuitry

ABSTRACT

Integrated circuitry fuse forming methods, integrated circuitry programming methods, and related integrated circuitry are described. In one implementation, a first layer comprising a first conductive material is formed over a substrate. A second layer comprising a second conductive material different from the first conductive material is formed over the first layer and in conductive connection therewith. A fuse area is formed by removing at least a portion of one of the first and second layers. In a preferred aspect, an assembly of layers comprising one layer disposed intermediate two conductive layers is provided. At least a portion of the one layer is removed from between the two layers to provide a void therebetween. In another aspect, programming circuitry is provided over a substrate upon which the assembly of layers is provided. The programming circuitry comprises at least one MOS device which is capable of being utilized to provide a programming voltage which is sufficient to blow the fuse, and which is no greater than the breakdown voltage of the one MOS device.

CROSS REFERENCE TO RELATED APPLICATION

This patent application is a Continuation Application of U.S. patentapplication Ser. No. 09/135,392, filed on Aug. 17,1998, now U.S. Pat.No. 6,249,037 B1, entitled “Integrated Circuitry Fuse Forming Methods,Integrated Circuitry Programming Methods, and Related IntegratedCircuitry”, naming H. Montgomery Manning as inventor, which is aDivisional of U.S. patent application Ser. No. 09/015,414, filed Jan.29, 1998, now U.S. Pat. No. 5,976,917.

TECHNICAL FIELD

This invention relates to integrated circuitry fuse forming methods,integrated circuitry programming methods, and integrated circuitrycomprising programmable integrated circuitry.

BACKGROUND OF THE INVENTION

Some types of integrated circuitry utilize fuses. A fuse is a structurewhich can be broken down or blown in accordance with a suitableelectrical current which is provided through the fuse to provide an opencircuit condition. Within the context of integrated circuitry memorydevices, fuses can be used to program in redundant rows of memory. Fuseshave use in other integrated circuitry applications as well.

One problem associated with integrated circuitry fuses is that thevoltage required to provide the necessary current to blow the fuse canbe very high, e.g., on the order of 10 volts. Because of this, memorycircuitry utilizing MOS logic cannot typically be used to route anappropriate programming signal or current to the fuse since the voltagerequired to do so would break down the gate oxide of the MOS device. Onesolution has been to provide a dedicated contact pad for each fuse sothat the desired programming voltage can be applied directly to the fusefrom an external source without the use of the MOS devices. Providing adedicated contact pad, however, utilizes valuable silicon real estatewhich could desirably be used for supporting other memory devices.

This invention arose out of concerns associated with providing improvedintegrated circuitry fuse forming methods and resultant fuseconstructions suitable for programming at relatively low programmingvoltages. This invention also arose out of concerns associated withconserving wafer real estate and providing integrated circuitry whichincorporates such improved fuse constructions.

SUMMARY OF THE INVENTION

Integrated circuitry fuse forming methods, integrated circuitryprogramming methods, and related integrated circuitry are described. Inone implementation, a first layer comprising a first conductive materialis formed over a substrate. A second layer comprising a secondconductive material different from the first conductive material isformed over the first layer and in conductive connection therewith. Afuse area is formed by removing at least a portion of one of the firstand second layers. In a preferred aspect, an assembly of layerscomprising one layer disposed intermediate two conductive layers isprovided. At least a portion of the one layer is removed from betweenthe two layers to provide a void therebetween. In another aspect,programming circuitry is provided over a substrate upon which theassembly of layers is provided. The programming circuitry comprises atleast one MOS device which is capable of being utilized to provide aprogramming voltage which is sufficient to blow the fuse, and which isno greater than the breakdown voltage of the one MOS device.

BRIEF DESCRIPTION OF THE DRAWINGS

Preferred embodiments of the invention are described below withreference to the following accompanying drawings.

FIG. 1 is a diagrammatic sectional view of a semiconductor waferfragment in process, undergoing processing in accordance with one aspectof the invention.

FIG. 2 is a view of the FIG. 1 wafer fragment at a different processingstep.

FIG. 3 is a view of the FIG. 1 wafer fragment at a different processingstep.

FIG. 4 is a view of the FIG. 1 wafer fragment at a different processingstep.

FIG. 5 is a view of the FIG. 1 wafer fragment at a processing step inaccordance with an alternate aspect of the invention.

FIG. 6 is a side sectional view of an integrated circuitry fuse which isformed in accordance with one aspect of the invention.

FIG. 7 is a view of the FIG. 1 wafer fragment at a different processingstep.

FIG. 8 is a high level diagram of integrated circuitry which is providedor formed in accordance with one aspect of the invention.

FIG. 9 is a diagram of a portion of the FIG. 8 diagram, with theillustrated fusing having been programmed or blown.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

This disclosure of the invention is submitted in furtherance of theconstitutional purposes of the U.S. Patent Laws “to promote the progressof science and useful arts” (Article 1, Section 8).

Referring to FIG. 1, a semiconductor wafer fragment in process is showngenerally at 10 and comprises a semiconductive substrate 12. In thecontext of this document, the term “semiconductive substrate” is definedto mean any construction comprising semiconductive material, including,but not limited to, bulk semiconductive materials such as asemiconductive wafer (either alone or in assemblies comprising othermaterials thereon), and semiconductive material layers (either alone orin assemblies comprising other materials). The term “substrate” refersto any supporting structure, including, but not limited to, thesemiconductive substrates described above. A plurality of stacks areformed over the substrate. Exemplary stacks are shown at 14, 16, 18.Each stack comprises a base layer 20, a first layer 22 formed over baselayer 20, and a second layer 24 formed over first layer 22 and baselayer 20. Collectively, layers 20, 22, 24 comprise assemblies 26 whichinclude at least one layer, i.e., layer 22, disposed intermediate twoother layers, i.e., layers 20, 24. The illustrated stacks run into andout of the plane of the page upon which FIG. 1 appears.

In the illustrated and preferred embodiment, each of layers 20, 22, and24 comprise conductive materials and accordingly, are in conductiveconnection with a next adjacent layer. First layer 22 comprises a firstconductive material and second layer 24 comprises a second conductivematerial which is different from the first conductive material. Thefirst conductive material is also different from the material comprisingbase layer 20. In the illustrated example, layer 22 is etchablydifferent from and more conductive than either of layers 20, 24 whichwill become apparent below. Exemplary materials for base layer 20include titanium or titanium nitride; exemplary materials for firstlayer 22 comprise conductive metal materials such as aluminum, AlCu orsome other suitable metal alloy; and an exemplary material for secondlayer 24 comprises titanium nitride. It is possible, however, for one ormore of the layers to be formed from material which is not conductive.For example, second layer 24 can comprise an insulative ornon-conductive material such as an inorganic anti-reflective coating(ARC) layer.

Referring to FIG. 2, a masking layer 28 is formed over substrate 12 andassemblies 26. An exemplary material for masking layer 28 isphotoresist.

Referring to FIG. 3, an opening 30 is formed through masking layer 28and a portion of centermost assembly 26 is exposed. Opening 30 definesan area over the exposed assembly 26 in which a fuse is to be formed.The portion of the assembly which is exposed through the masking layerconstitutes less than an entirety of the assembly which runs into andout of the plane of the page.

Referring to FIG. 4, at least a portion of first layer 22 is removed todefine a void 32 intermediate base layer 20 and second layer 24. Layers20, 24 are supported proximate the void by portions of layer 22 whichare not removed and which are disposed into and out of the plane of thepage. Such unremoved layer 22 portions are shown in more detail in FIG.6. Collectively, the illustrated portions of layers 20, 24 and void 32define a fuse area 34. In the FIG. 4 example, essentially all of firstlayer 22 is removed within fuse area 34. Such removal can be achieved byselectively etching the material comprising first layer 22 relative tothe material comprising layers 20, 24. Where layers 20, 24 comprisetitanium and layer 22 comprises aluminum, an exemplary etch is a wetetch which utilizes hot phosphoric acid at a temperature of around 90°C. at atmospheric pressure and for a duration appropriate to remove thelayer. The duration of the etch can, however, be modified so that lessthan an entirety of first layer 22 is removed within fuse area 34. Suchis accordingly shown in FIG. 5 at 22 a where less than the entirety oflayer 22 is removed along a shortest possible line “A” extending fromone of the pair of conductive layers to the other of the pair ofconductive layers and through void 32. Leaving an amount of a moreconductive layer 22 a behind may be desirable from the standpoint ofreducing the overall resistivity of the fuse.

Referring to FIG. 6, fuse area 34 is defined to have a length dimensionl, a width dimension into and out of the page, and a height dimension h.Exemplary length dimensions are from between about 0.5 micron to 1micron. An exemplary width dimension is around 0.25 micron. An exemplaryheight dimension is around 4000 Angstroms. Concurrent and subsequentprocessing to complete formation of integrated circuitry whichincorporates one or more fuses can take place in accordance withconventional techniques. For example, FIG. 7 shows an additional layerof material 44 which has been formed over the substrate and in fuse area34. In the illustrated example, material 44 is formed proximate void 32and does not meaningfully fill the void. Such provides an air or vacuumgap proximate the illustrated layers and within void 32. The air orvacuum gap can desirably lower the programming voltage necessary to blowthe fuse. An exemplary material for material 44 is a dielectric materialwhich can be formed through plasma enhanced chemical vapor depositiontechniques. Such deposition provides a substantially enclosed void, withthe exemplary void being enclosed by material of layers 20, 22, 24 and44.

Referring to FIG. 8, an exemplary implementation comprising integratedcircuitry formed in accordance with the above-described methodology isshown generally at 36. Programming circuitry 38 is provided and isoperably connected with a fuse 40 which has been formed in accordancewith the above-described methodology. Memory circuitry 42 is providedand is operably coupled with programming circuitry 38 and fuse 40. Inone preferred aspect, programming circuitry 38 comprises at least oneMOS device which is formed over the same substrate upon which fuse 40 issupported. Fuse 40 can be exposed to a programming voltage throughprogramming circuitry 38 which is sufficient to blow the fuse. In theillustrated example, MOS devices comprising programming circuitry 38have breakdown voltages associated with breakdown of thesource/drain-to-substrate junction and breakdown of the gate oxide. Inone aspect, fuse 40 can be programmed with a programming voltage whichis no higher than the breakdown voltage of the MOS devices comprisingprogramming circuitry 38. An exemplary programming voltage can beprovided which is less than 10 volts. In a preferred aspect, theprogramming voltage is no greater than about 5 volts. In this way, MOSdevices can be utilized to route a programming signal to fuse 40. Suchprogramming signal is accordingly provided by a programming voltagewhich is no greater than the breakdown voltage of the MOS devices.

Referring to FIG. 9, fuse 40 has been suitably programmed through theprogramming circuitry.

The above-described methodologies and structures reduce the wafer realestate which is needed to provide suitable programming voltages andsignals to programmable integrated circuitry devices. Such isaccomplished in one aspect by reducing, if not eliminating all together,the need for large dedicated contact pads for each fuse. In otheraspects, fuses formed in accordance with the invention can be tied to asuitable contact pad and programmed accordingly. Additionally, theabove-described methodologies and structures enable programming to beconducted at locations other than locations where such devices arefabricated. Specifically, a programmer can suitably program deviceswhich incorporate the above-described structures at the programmer's ownfacility.

In compliance with the statute, the invention has been described inlanguage more or less specific as to structural and methodical features.It is to be understood, however, that the invention is not limited tothe specific features shown and described, since the means hereindisclosed comprise preferred forms of putting the invention into effect.The invention is, therefore, claimed in any of its forms ormodifications within the proper scope of the appended claimsappropriately interpreted in accordance with the doctrine ofequivalents.

What is claimed is:
 1. Programmable integrated circuitry comprising: programming circuitry supported by a substrate and comprising at least one MOS device; a fuse supported by the substrate and operably connected with the programming circuitry, the fuse comprising a pair of fusible conductive layers of material and a void between the pair of fusible conductive layers; and said programming circuitry being operable to provide a programming voltage no greater than a breakdown voltage of the one MOS device, wherein the pair of fusible conductive layers of material comprise titanium.
 2. The programmable integrated circuitry of claim 1, wherein the pair of fusible conductive layers comprises an entirety of one fusible conductive layer separated from an entirety of the other fusible conductive layer.
 3. Programmable integrated circuitry comprising: programming circuitry supported by a substrate and comprising at least one MOS device; a fuse supported by the substrate and operably connected with the programming circuitry, the fuse comprising a pair of fusible conductive layers of material and a void between the pair of fusible conductive layers; and said programming circuitry being operable to provide a programming voltage no greater than a breakdown voltage of the one MOS device, wherein the void is filled with air.
 4. The programmable integrated circuitry of claim 3, wherein the pair of fusible conductive layers comprises an entirety of one fusible conductive layer separated from an entirety of the other fusible conductive layer.
 5. Programmable integrated circuitry comprising: programming circuitry supported by a substrate and comprising at least one MOS device; a fuse supported by the substrate and operably connected with the programming circuitry, the fuse comprising a pair of fusible conductive layers of material and a void between the pair of fusible conductive layers; and said programming circuitry being operable to provide a programming voltage no greater than a breakdown voltage of the one MOS device, wherein the fuse is covered by a dielectric layer.
 6. The programmable integrated circuitry of claim 5, wherein the dielectric layer is formed by plasma enhanced chemical vapor deposition.
 7. The programmable integrated circuitry of claim 5, wherein the void is formed between one of the pair of fusible conductive layers of material and the substrate.
 8. The programmable integrated circuitry of claim 5, wherein the programming voltage is no greater than about 5 volts and is sufficient to blow the fuse.
 9. The programmable integrated circuitry of claim 5, wherein the void is disposed adjacent and between the pair of fusible conductive layers of material.
 10. The programmable integrated circuitry of claim 5, wherein the pair of fusible conductive layers comprises an entirety of one fusible conductive layer separated from an entirety of the other fusible conductive layer.
 11. Integrated circuitry comprising a fuse, the fuse comprising a pair of conductive layers each having fuse-forming portions separated from one another by a void.
 12. The integrated circuitry of claim 9 further comprising a layer of dielectric material disposed proximate said fuse-forming portions and together therewith substantially enclosing the void.
 13. The circuitry of claim 12 wherein the void encloses a vacuum.
 14. The circuitry of claim 11, wherein the pair of conductive layers comprise titanium.
 15. The circuitry of claim 11, further comprising a layer of dielectric material formed on the fuse-forming portions, the dielectric layer enclosing the void, wherein the void is encloses a vacuum.
 16. The integrated circuitry of claim 11, wherein the pair of fusible conductive layers comprises an entirety of one fusible conductive layer separated from an entirety of the other fusible conductive layer.
 17. An integrated circuit comprising: memory circuitry; a plurality of fuses operably coupled to the memory circuitry, the fuses each comprising: a pair of fusible conductive layers of material; and a void formed between the pair of fusible conductive layers of material.
 18. The integrated circuit of claim 17, further comprising programming circuitry and including at least one MOS device, wherein each fuse of the plurality of fuses is operably coupled to the programming circuitry.
 19. The integrated circuit of claim 18, wherein the programming circuitry is configured to provide a programming voltage sufficient to blow one of the plurality of fuses, which programming voltage is no greater than a breakdown voltage of the one MOS device.
 20. The integrated circuit of claim 17, wherein the pair of fusible conductive layers comprise titanium.
 21. The integrated circuit of claim 17, wherein one of the pair of fusible conductive layers is formed between the void and a substrate.
 22. The integrated circuit of claim 17, further comprising a dielectric layer formed on the plurality of fuses and wherein each void encloses a vacuum.
 23. An integrated circuit comprising: memory circuitry; programming circuitry comprising at least one MOS device, the programming circuitry configured to provide a programming voltage; a plurality of fuses operably coupled to the memory and programming circuitry, each of the plurality of fuses comprising: a pair of fusible conductive layers of material formed above a substrate; and a void between the pair of fusible conductive layers of material.
 24. The integrated circuit of claim 23, wherein the programming voltage is no greater than a breakdown voltage of the one MOS device and is sufficient to blow a fuse of the plurality of fuses.
 25. The integrated circuit of claim 23, further comprising a dielectric layer formed on the plurality of fuses and enclosing respective voids in the plurality of fuses.
 26. The integrated circuit of claim 23, wherein each respective void is formed between a substrate and a respective one of the pair of fusible conductive layers of material.
 27. The integrated circuit of claim 23, wherein each respective pair of layers of fusible conductive material includes titanium.
 28. The integrated circuit of claim 23, wherein each respective pair of layers of fusible conductive material includes titanium nitride.
 29. The integrated circuit of claim 23, wherein each respective void is formed between a substrate and a respective one of the pair of layers of fusible conductive material and another respective one of the pair of layers of fusible conductive material is formed between the void and the substrate.
 30. Programmable integrated circuitry comprising: programming circuitry supported by a silicon-comprising substrate and comprising at least one MOS device; a fuse supported by the substrate and operably connected with the programming circuitry, the fuse comprising a pair of fusible conductive layers of material and a void between the pair of fusible conductive layers; and said programming circuitry being operable to provide a programming voltage no greater than a breakdown voltage of the one MOS device.
 31. Programmable integrated circuitry comprising: programming circuitry supported by a silicon-comprising substrate and comprising at least one MOS device; a fuse supported by the substrate and operably connected with the programming circuitry, the fuse comprising a pair of fusible conductive layers of material and a void between the pair of fusible conductive layers, the void comprising a vacuum; and said programming circuitry being operable to provide a programming voltage no greater than a breakdown voltage of the one MOS device. 